Polycrystalline Silicon for Integrated Circuit Applications.pdf

Polycrystalline Silicon for Integrated Circuit Applications PDF

Ted Kamins

Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa­ tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor­ mance. As device performance improves, however, some of the proper­ ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili­ con also need to be better understood to minimize potential degradation of circuit behavior.

Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being

4.52 MB DATEIGRÖSSE
1461289491 ISBN
Englisch SPRACHE
Polycrystalline Silicon for Integrated Circuit Applications.pdf

Technik

PC und Mac

Lesen Sie das eBook direkt nach dem Herunterladen über "Jetzt lesen" im Browser, oder mit der kostenlosen Lesesoftware Adobe Digital Editions.

iOS & Android

Für Tablets und Smartphones: Unsere Gratis tolino Lese-App

Andere eBook Reader

Laden Sie das eBook direkt auf dem Reader im Hugendubel.de-Shop herunter oder übertragen Sie es mit der kostenlosen Software Sony READER FOR PC/Mac oder Adobe Digital Editions.

Reader

Öffnen Sie das eBook nach der automatischen Synchronisation auf dem Reader oder übertragen Sie es manuell auf Ihr tolino Gerät mit der kostenlosen Software Adobe Digital Editions.

Aktuelle Bewertungen

avatar
Sofia Voigt

Wafer-Level Packaging for RF Applications Using High-Resistivity Polycrystalline Silicon Substrate Technology A. Polyakov1, S. Sinaga1, P to that of the integrated circuit (IC) wafer, and the full compatibility with silicon processing. HRPS Substrate Electrical Characterization HRPS wafers having diameter of 4 inch used in our experiments, were obtained from high-resistivity (~4kOhm-cm

avatar
Matteo Müller

Polycrystalline silicon (poly-Si) is an important component of silicon integrated-circuit (IC) technology and is currently used in a wide range of device applications. The fundamental properties of silicon-germanium (Si _{rm 1-x}Ge_ {rm x}) indicate that poly-Si _{rm 1-x}Ge_ {rm x} can be a favorable alternative to poly-Si in many of these applications. Since the melting point of Si_{rm 1-x}Ge

avatar
Noel Schulze

LPCVD against PECVD for micromechanical … Kamins T 1988 Polycrystalline Silicon for Integrated Circuit Applications (Deventer: Kluwer) [3] Campmany J, Andújar J L, Canillas A, Cifre J and Bertran E 1993 Plasma-deposited silicon nitride films with low hydrogen content for amorphous silicon thin-film transistors application …

avatar
Jason Lehmann

Wafer-Level Packaging for RF Applications Using High-Resistivity Polycrystalline Silicon Substrate Technology A. Polyakov1, S. Sinaga1, P to that of the integrated circuit (IC) wafer, and the full compatibility with silicon processing. HRPS Substrate Electrical Characterization HRPS wafers having diameter of 4 inch used in our experiments, were obtained from high-resistivity (~4kOhm-cm

avatar
Jessica Kohmann

These are employed in solar cells and electronic applications. ... Polysilicon is used in Integrated Circuits and electronic gates (MOSFETS and CMOS), resistors  ... Although transistors made many new electronic applications possible, engineers ... Silicon dioxide is used as an insulator and as a dielectric material in IC capacitors. ... Tracks of polycrystalline silicon or aluminum are next etched into layers ...